
PVD Physical vapor deposition
There are three types of equipment: 500, 700 and 900.The system is mainly composed of evaporation chamber, rotating substrate frame, light heating system, electron gun and electron gun power supply, quartz crysta...
Cantón, China
Cantón, China
Cantón, China
Cantón, China
PECVD Plasma enhanced chemical vapor deposition equipment
◆ loading quantity: 384 pieces/boat (125 * 125); 336 pieces/boat (156 * 156) | ◆ cleanliness of purification table: Grade 100 (Grade 10000 plant) | ◆ automation degree: automatic control of temperature and proces...
Cantón, China
Cantón, China
MDICP-5000F Fully automatic ICP etching machine
▲alarm system: Safety requirements for equipment. | 1. limit vacuum: Etching chamber 9.0×10-5Pa (Indoor humidity≤55%) | 2. etching material: Ⅲ、ⅤMaterial、Si 、SiO2,etc | 3. etching rate: ~ 1μ/min | 4. etching unifo...
Cantón, China
Cantón, China
Cantón, China
Cantón, China

