Building Filters
Yamato PDC210
- Fabricante: Yamato
- Modelo: PDC210
Plasma mode: RIE（DP mode is optional） | Electrode structure: Parallel flat stage | Rf power: MAX. 500W | Oscillation frequency: 13.56MHz Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W400 × D...
Tokio, Japón
Yamato PDC200
- Fabricante: Yamato
Plasma mode: RIE（DP mode is optional） | Electrode structure: Parallel flat stage | Rf power: MAX. 300W | Oscillation frequency: 13.56MHz Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W400 × D...
Tokio, Japón
Yamato V1000XS
- Fabricante: Yamato
Plasma mode: DP/RIE | Oscillation frequency: 13.56MHz | Rf power: 1,000 ~ 2,000W | Stage dimensions: 400W × 375D mm, Parallel flat stage plate (Multi) | Reaction gas: Mass flow control, 2 system + 1 for purge gas...
Tokio, Japón
Yamato V1000
- Fabricante: Yamato
Plasma mode: DP/RIE | Oscillation frequency: 13.56MHz | Rf power: 1,000W | Stage dimensions: 280W × 280D mm Parallel flat stage | Reaction gas: Mass flow control, 2 system + 1 for purge gas | Vacuum pump: Include...
Tokio, Japón
Yamato PR510
- Fabricante: Yamato
System: DP mode, Barrel type | High frequency output: Max. 500W | Oscillation frequency: 13.56MHz | Tuning method: Automatic tuning | Reaction chamber: Quartz φ215 × L305 mm x 1 chamber | Reaction gas system: Dua...
Tokio, Japón
Yamato PR500
- Fabricante: Yamato
System: DP mode, Barrel type | High frequency output: Max. 500W | Oscillation frequency: 13.56MHz | Tuning method: Automatic tuning | Reaction chamber: Quartz φ215 × L305 mm x 1 chamber | Reaction gas system: Dua...
Tokio, Japón
Yamato PR200
- Fabricante: Yamato
System: DP mode, Barrel type | High frequency output: Max. 200W | Oscillation frequency: 13.56MHz | Tuning method: Automatic | Reaction chamber: Pyrex Glass φ100× L160mm | Reaction gas system: 1 system (oxygen), ...
Tokio, Japón
Yamato PR301
- Fabricante: Yamato
System: DP mode, Barrel type | High frequency output: Max. 300W | Oscillation frequency: 13.56MHz | Tuning method: Manual biaxial | Reaction chamber: Pyrex Glass φ118 × L160mm x 1 chamber | Reaction gas system: 1...
Tokio, Japón
Yamato PR300
- Fabricante: Yamato
System: DP mode, Barrel type | High frequency output: Max. 300W (100W x 3 chambers) | Oscillation frequency: 13.56MHz | Tuning method: Manual biaxial | Reaction chamber: Pyrex Glass φ64 × 160mm x 3 chambers | Rea...
Tokio, Japón
Yamato DP1030
- Fabricante: Yamato
Internal dimensions（w×d×h mm）: 1000×1000×1000mm | External dimensions（w×d×h mm）: 1300×1280×2110mm | Remarks(dimensions): 1000L | Power source: AC220V/380V Three-phase | Weight: 1000kg | Method: Vacuum drying by d...
Tokio, Japón
Yamato DH1032
- Fabricante: Yamato
System: Forced air circulation and ventilation | Operating temp. range: Room temp. +15°C~300°C | Temperature fluctuation: 3.0°C (at 300°C) | Temperature slope: 18°C (at 300°C) | Temperature controller: PID contro...
Tokio, Japón
Yamato DF832
- Fabricante: Yamato
Fan motor: Axial flow fan (capacitor motor: 20W) | Cable port: I.D. ø30mm (rear) | Heat insulator: Glass wool | Other additional structure: Exhaust damper (manual operation) | Safety device: Self-diagnostic funct...
Tokio, Japón
Yamato DH832
- Fabricante: Yamato
System: Forced air circulation and ventilation | Operating temp. range: Room temp. +15°C~300°C | Temperature fluctuation: 3.0°C (at 300°C) | Temperature slope: 18°C (at 300°C) | Temperature controller: PID contro...
Tokio, Japón
Yamato DF1032
- Fabricante: Yamato
Fan motor: Axial flow fan (capacitor motor: 20W), Two motors used for Model 1032 | Cable port: I.D. ø30mm (rear) | Heat insulator: Glass wool | Other additional structure: Exhaust damper (manual operation) | Safe...
Tokio, Japón
Yamato FP313
- Fabricante: Yamato
Operating temp. range: 100～1,150℃ | Temp. control accuracy: ±1.0℃（at 1150℃） | Temp. fluctuation: 2.0℃（at 1150℃） | Temp. distribution: ±4.0℃（at 1150℃） | Temp. gradient: 14℃（at 1150℃） | Max. temp. reaching time: Ap...
Tokio, Japón