Usado parallel en Japón

Yamato PDC210

• Fabricante: Yamato
• Modelo: PDC210

Plasma mode: RIE（DP mode is optional） | Electrode structure: Parallel flat stage | Rf power: MAX. 500W | Oscillation frequency: 13.56MHz　Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W400 × D...

Yamato PDC200

• Fabricante: Yamato

Plasma mode: RIE（DP mode is optional） | Electrode structure: Parallel flat stage | Rf power: MAX. 300W | Oscillation frequency: 13.56MHz　Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W400 × D...

Yamato PiPi

• Fabricante: Yamato

Plasma mode: RIE (reactive ion etching) | Electrode structure: Parallel flat panel type | Electrode dimensions: W130×D130mm | Internal dmensions: W230×D130×H100mm | External dimensions: W438×D520×H565mm | Power s...

Yamato DL410

• Fabricante: Yamato
• Modelo: DL410

Water evaporation rate: Max. approx. 3,000 ml/h | Temperature control range: 40°C - 300°C at inlet | Dry air flow rate: 0.3 - 1.0 m³/min | Spraying system: Two-way nozzle (Dia. of orifice: 0.7mm) Nozzle No.3 stan...

Yamato V1000

• Fabricante: Yamato

Modo de plasma: DP/RIE | Frecuencia de oscilación: 13.56MHz | Potencia rf: 1,000W | Dimensiones del escenario: 280W × 280D mm　Etapa plana paralela | Gas de reacción: Control de caudal másico, 2 sistemas + 1 para ...

FEB-LINE INSPECTION DATA CREATION SYSTEM UA1781

License content: Install CD, license key (USB), instruction manual *Note: Please purchase hardware such as PC and monitor separately. | Supported os: Windows 10 Pro 64-bit, Windows 7 Professional 64-bit | Data en...