Building Filters
Yamato V1000XS
- Fabricante: Yamato
Plasma mode: DP/RIE | Oscillation frequency: 13.56MHz | Rf power: 1,000 ~ 2,000W | Stage dimensions: 400W × 375D mm, Parallel flat stage plate (Multi) | Reaction gas: Mass flow control, 2 system + 1 for purge gas...
Tokio, Japón
Yamato V1000
- Fabricante: Yamato
Plasma mode: DP/RIE | Oscillation frequency: 13.56MHz | Rf power: 1,000W | Stage dimensions: 280W × 280D mm Parallel flat stage | Reaction gas: Mass flow control, 2 system + 1 for purge gas | Vacuum pump: Include...
Tokio, Japón
Yamato PDC210
- Fabricante: Yamato
- Modelo: PDC210
Plasma mode: RIE（DP mode is optional） | Electrode structure: Parallel flat stage | Rf power: MAX. 500W | Oscillation frequency: 13.56MHz Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W400 × D...
Tokio, Japón
Yamato PDC510
- Fabricante: Yamato
Plasma mode: RIE / DP mode changeable | Electrode structure: Parallel flat stage | Rf power: MAX. 500W | Oscillation frequency: 13.56MHz Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W500 × D...
Tokio, Japón
Yamato PDC610
- Fabricante: Yamato
Plasma mode: RIE and DP mode changeable by touch panel | Electrode structure: 3-stage independent parallel flat stage | Rf power: MAX. 600W | Oscillation frequency: 13.56MHz Quartz Oscillator | Chamber dimensions...
Tokio, Japón
Yamato PDC200
- Fabricante: Yamato
Plasma mode: RIE（DP mode is optional） | Electrode structure: Parallel flat stage | Rf power: MAX. 300W | Oscillation frequency: 13.56MHz Quartz Oscillator | Display: LED touch panel | Chamber dimensions: W400 × D...
Tokio, Japón
Yamato PiPi
- Fabricante: Yamato
Plasma mode: RIE (reactive ion etching) | Electrode structure: Parallel flat panel type | Electrode dimensions: W130×D130mm | Internal dmensions: W230×D130×H100mm | External dimensions: W438×D520×H565mm | Power s...
Tokio, Japón
Yamato DL410
- Fabricante: Yamato
- Modelo: DL410
Water evaporation rate: Max. approx. 3,000 ml/h | Temperature control range: 40°C - 300°C at inlet | Dry air flow rate: 0.3 - 1.0 m³/min | Spraying system: Two-way nozzle (Dia. of orifice: 0.7mm) Nozzle No.3 stan...
Tokio, Japón