Usado material handling en Gujo, Gifu, Japón

HORIBA STEC, Co., Ltd. LU-A1000 series

• Fabricante: Horiba

Liquids supported: TEOS, TMOB, TMOP, TEOP, BTBAS | Supply method: Pressure movement from He gas | Gas supply pressure: For pressure movement: 0.3 to 0.6 MPa (G); For purge: 0.3 to 0.6 MPa (G), OP N 2 0.6 to 0.7 M...