MDXN-25X High precision single side lithography machine en Cantón, Guangdong, China
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Especificaciones
- Condición
- nuevo
- Light source
- GCQ350Z ultra-high pressure mercury direct current mercury lamp is used.
- Lighting range
- ≤ ф 117mm
- Exposure area
- ф 100mm
- A. hard contact exposure
- Use pipeline vacuum to obtain high vacuum contact, vacuum ≤ -0.05MPa
- B. soft contact exposure
- The contact pressure can raise the vacuum to between -0.02MPa and -0.05MPa.
- C. micro contact exposure
- less than soft contact, vacuum ≥ -0.02MPa.
- 7. exposure resolution
- The resolution of hard contact exposure of this device can reach 1 μ Above m (the accuracy of the user's "plate" and "chip" must comply with national regulations, and the environment, temperature, humidity, and dust can be strictly controlled. Imported positive photoresist is used, and the thickness of the uniform photoresist can be strictly controlled. In addition, the front and rear processes are advanced).
- 8. alignment
- The observation system consists of two CCD cameras mounted on two single tube microscopes and connected to the display screen through a video cable.
- Categoría
- Mask Aligners en China
- ID de Anuncio
- 91750809
Descripción
MDXN-25X
High precision single sided lithography machine
Purpose and
characteristics
This equipment is a precision lithography machine
developed by our company specifically for the use characteristics of
lithography machines in various colleges and research institutions. It is
mainly used for the development and production of small and medium-sized
integrated circuits, semiconductor components, optoelectronic devices, and
surface acoustic wave devices.
Main technical
parameters
1. The device can vacuum adsorb a 5 "X5"
square mask, with no special requirements for the thickness of the plate
(ranging from 1 to 3mm).
2. The device can be applied to ф 100mm circular
substrate;
3. Substrate thickness ≤ 5mm;
4. Lighting:
stay ф Within a range of 100mm, the unevenness of
exposure is ≤ ± 3%, and the exposure intensity is>6mw/cm2 (this indicator is
measured using a UV light source I-line 365nm).
5. This device adopts an imported time relay to