Cosmo-3 Customizable Slurry Delivery System en Chandler, Arizona, USA

Take the Chaos out of Slurry Distribution!
The Axus Technology Cosmo-3 Customizable Slurry Delivery System is the ultimate precision blending and distribution system specifically designed for wafer manufacturing fabs with high volume CMP applications. We understand that one-sized solutions do not fit all situations. The Cosmo-3 comes completely customizable, utilizing a combination of three modules.
CBU+ Blend & Distribution Module with up to a 10-liter Oxidizer Tank, up to a 25-liter Blend Tank, and up to a 100-liter Distribution Tank
CDU Drum Module with chemical delivery options up to 1000Kg
Control Module with management for up to 6 sub modules (2 CBU+ Blend & Distribution Modules & 4 CDU Drum Modules) with low power consumption. Metrology options ensure slurry blend accuracy and quality for batch-to-batch consistency.